Fig. 9

An example of an AFM image of a portion of two adjacent grooves of a ruled grating. The sample serial number is 1528-1-2-3. X is the axis perpendicular to the groove, Y is parallel to the grooves, and Z is the groove height. This is a planar red blazed reflection grating with a groove density of 67.556/mm. The facet shape and roughness are evident.