Scattering intensity of the 4200 /mm 41-rough-trapezium-boundary Mo/Si FL1 grating computed using 105 boundary sets and N = 1000 in PCGrate-SX v.6.5 at an angle of incidence of 6.5° and at an 19.25-nm-wavelength vs. scattering angle.
Scattering intensity of the 4200 /mm 41-rough-trapezium-boundary Mo/Si FL1 grating computed using 105 boundary sets and N = 1000 in PCGrate-SX v.6.5 at an angle of incidence of 6.5° and at an 19.25-nm-wavelength vs. scattering angle.
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