Scattering intensity convergence of the 4200 /mm 41-rough-boundary Mo/Si FL1 grating computed using N = 1000 and different numbers of randomized-boundary sets in PCGrate-SX v.6.5 at an angle of incidence of 6.5° and at an 19.25-nm-wavelength vs. scattering (diffraction) angle.
International Intellectual Group, Inc.
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