Order intensity convergence of the 4200 /mm 41-rough-boundary Mo/Si FL1 grating computed using seven boundary sets and different accuracy parameter N in PCGrate-SX v.6.5 at an angle of incidence of 6.5° and at an 19.25-nm-wavelength vs. scattering order number.
International Intellectual Group, Inc.
A world leader in modeling of the diffraction gratings efficiency for spectroscopy, astronomy, telecommunications, photolithography, and nanotechnology.
