Relative (groove) efficiencies of the investigating MoRu/Be grating calculated using the “resonance” calculation mode under perfect substrate conductivity of PCGrate-SX v.6.1 at an angle of incidence of -13.9° for the indicated diffraction orders in the 4.5—30-nm wavelength range.
International Intellectual Group, Inc.
A world leader in modeling of the diffraction gratings efficiency for spectroscopy, astronomy, telecommunications, photolithography, and nanotechnology.
