The efficiency certificate of orders of a 2400 g/mm blazed holographic concave master grating working in the soft X-ray—EUV range. Efficiency calculated for the average AFM groove profile of 7.0 nm depth and RIs of SiO2 taken from the CXRO compilation.
International Intellectual Group, Inc.
A world leader in modeling of the diffraction gratings efficiency for spectroscopy, astronomy, telecommunications, photolithography, and nanotechnology.
