Presentation at Nanostructures: Physics and Technology 2009

Presentation at the International Symposium Nanostructures: Physics and Technology, June 22-26, 2009, Minsk, Belarus
Grazing-incidence X-ray reflectometry for structural characterization of samples containing Ge/Si quantum dots
L. I. Goray, N. I. Chkhalo, and Yu. A. Vainer
 
 
ABSTRACT
High-resolution grazing-angle X-ray reflectometry measurements have yielded experimental and theoretical intensities of specular and diffuse reflection from MBE grown structures with single-layer unburied and multi-layer buried Ge/Si quantum dots (QD). The face slopes measured with a high precision (±0.1°) from the position of diffuse scattering peaks in direct space have supported the validity of the known model of QD formation within wells with a structure of inverted pyramids with {11n}, n = 7-11 faces. ISBN 978-5-93634-051-2.
© 2009 Ioffe Institute.
 
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